Description: This book examines non-equilibrium "cold" plasmas via a chemical physics approach, using state-to-state plasma kinetics, which views each internal state as a new species with its own cross-sections. Includes examples in microelectronics, fusion, and aerospace.
Review Quotes:
"The work will be a valuable resource for researchers using many applications involving nonequilibrium cold plasmas such as plasma beams, etching, cleaning, deposition, surface activation, and gas lasers. ... Extensive references are provided, chapter-by-chapter, in addition to useful tables of reactions and processes with descriptions and references. ... Summing Up: Recommended. Graduate students, researchers/faculty, and professionals/practitioners." (T. Eastman, Choice, Vol. 53 (10), June, 2016)