Description:
Green Etching Techniques for MEMS Applications delivers an essential and comprehensive exploration of sustainable, fluorine-free etching methodologies for micro-electro-mechanical systems (MEMS).
Pub Date: December 19, 2025
Lexile Code: 0000
Features: Illustrated
Target Age Group: NA to NA
Physical Info: 0.38" H x 9.21" L x 6.14" W ( 0.82 lbs) 122 pages
BISAC Categories:
Technology and Engineering | Systems Engineering | Nanotechnology and MEMS | Manufacturing | Environmental | Pollution Control
Description:
Green Etching Techniques for MEMS Applications delivers an essential and comprehensive exploration of sustainable, fluorine-free etching methodologies for micro-electro-mechanical systems (MEMS).