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Run-To-Run Control in Semiconductor Manufacturing

Contributor(s): Moyne, James (Editor), Del Castillo, Enrique (Editor), Hurwitz, Arnon M (Editor)

ISBN: 9780849311789

Publisher: CRC Press

Hardcover
$245.00
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Pub Date: November 30, 2000

Dewey: 621.38152

LCCN: 00059910

Lexile Code: 0000

Features: Illustrated

Target Age Group: NA to NA

Physical Info: 0.88" H x 9.52" L x 6.35" W ( 1.36 lbs) 366 pages

Descriptions, Reviews, etc.

Description: The fruit of nearly ten years of active work and collaboration in both the academic and industrial settings, this book offers in-depth analyses of run-to-run (R2R) control. The authors develop methods with a totally new, commercially proven approach that provides a path to the robust, effective R2R control destined to replace the ad hoc, piecemeal, error-prone, or, in most cases, nonexistent sequential control methods of the past. Through manufacturing case studies, this book provides justification for and demonstrates the benefits of run-to-run control, and offers the know-how and direction for incorporating R2R control into readers' manufacturing capabilities.

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